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Edwards Vacuum PumpiXL-120

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iXL120 is a compact, low energy, 110 m3/h dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption.
iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment.

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A: The use of multiple discount codes for a single order may be subject to certain restrictions. Please refer to the terms and conditions of the discount codes or contact our customer service team for more information.

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Anonymous user

Nov 25, 2022

Edwards Vacuum PumpiXL-120

All was ok! No problems whatsoever.

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Edwards Vacuum PumpiXL-120

There is no price at present, you can Request a Quote

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Edwards Vacuum PumpiXL-120

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