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Compact Footprint – Smallest in the industry.
Low Cost of Ownership – Only 1.4 kW of power.
Unique Patent Protected Pumping Mechanism – Pump down at atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures.
Ultra Clean Mechanism – No grease or oil lubricated bearings exposed to high vacuum that allows no other source of potential contamination.
Extremely Reliable – Has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump.
Network Compatible – Available with End User Control and can be connected to a fab-wide network for diagnostic monitoring and control.
Ask questions
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- Q: Are there size restrictions for international shipping?
A: International shipping may have size and weight restrictions depending on the destination country and shipping carrier's policies. During the checkout process, the available shipping options and any size restrictions will be displayed based on the dimensions and weight of the items in your cart.
- Q: Can I request a price adjustment if the item I purchased goes on sale?
A: If the item you purchased goes on sale within a specified timeframe, you may be eligible for a price adjustment. Please contact our customer service with your order details and the sale information, and we will review your request based on our price adjustment policy.
- Q: Do you support global shipping?
A: Yes, we support worldwide shipping. No matter where you are located, we will make every effort to deliver the products to your doorstep.
Reviews
- A
Anonymous user
Nov 25, 2022
Edwards Vacuum Pump EXP180LAll was ok! No problems whatsoever.HelpfulUnhelpful
Edwards Vacuum Pump EXP180L
There is no price at present, you can Request a Quote
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