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Compact Footprint – Smallest in the industry.
Low Cost of Ownership – Only 1.4 kW of power.
Unique Patent Protected Pumping Mechanism – Pump down at atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures.
Ultra Clean Mechanism – No grease or oil lubricated bearings exposed to high vacuum that allows no other source of potential contamination.
Extremely Reliable – Has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump.
Network Compatible – Available with End User Control and can be connected to a fab-wide network for diagnostic monitoring and control.
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Reviews
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Anonymous user
Nov 25, 2022
Edwards Vacuum Pump EXP180LAll was ok! No problems whatsoever.HelpfulUnhelpful
Edwards Vacuum Pump EXP180L
There is no price at present, you can Request a Quote
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